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IEC 62047-11 2013 Semiconductor devices - Micro-electromechanical devices - Part 11 Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical syst
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IEC 62047-11 2013 Semiconductor devices - Micro-electromechanical devices - Part 11 Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical syst
