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IEC 63068-2 2019 Semiconductor devices Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 2 Test method for defects using optical inspecti
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IEC 63068-2 2019 Semiconductor devices Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 2 Test method for defects using optical inspecti
